Ultrahigh Vaccum Film Deposition Chamber
Base pressure: 10-7 Pa, 6 e-beam evaporators, one Knudsen cell,
Substrate tempertaure up to 1000 K, Reflection High Energy Electron Diffraction,
Motor-controlled Shutter for wedge structure, Full load lock and sample transfer system.
Cryogenic Probe Station
The NAGASE probe station is used for nondestructive testing of electrical and magnetic devices. It operates over a temperature range of 10 K to 300 K with a magnetic field up to 0.8 T. It allows for DC and RF measurments up to 40 GHz.
RT Probe Station
It operates at room temperature. The electromagnet rotation allows for in-plane-angular-dependent measurments within a magnetic field of 0.4 T.
Microwave Network Analyzer
KEYSIGHT N5222A, 10 MHz to 26.5 GHz, Output power up to +13dBm.
KEYSIGHT DSA91304A, 13 GHz bandwidth, 40 GSa/s.
PLPS 10,060A, 10 V, 55 ps risetime pulse, 100 ps to 10 ns pulse duration.
Rapid Thermal Annealing System
Temperature: up to 700℃, Magnetic Field: up to 1T.